Blank Cover Image

Processing of Tungsten Single Crystals by Chemical Vapor Deposition

Author(s):
Publication title:
CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-13
Pub. Year:
2000
Page(from):
571
Page(to):
578
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772785 [1566772788]
Language:
English
Call no.:
E23400/200013
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings THE EFFECTS OF DOPANTS AND CRYSTAL PERFECTION ON THE CHEMICAL VAPOR DEPOSITION OF TUNGSTEN ON SILICON BY SILICON REDUCTION OF TUNGSTEN HEXAFLUORIDE

Green, M.L., Ali, Y.S., Davidson, B.A., Feldman, L.C., Nakahara, S.

Materials Research Society
7 Conference Proceedings *LOW PRESSURE CHEMICAL VAPOR DEPOSITION OF TUNGSTEN AND ALUMINUM FOR VLSI APPLICATIONS

Levy, R.A., Green, M.L.

Materials Research Society
2 Conference Proceedings CHEMICAL VAPOR DEPOSITION OF SILICON FILMS USING HEXACHLORODISILANE

Taylor, R.C., Scott, B.A., Lin, S.-T., LeGoues, F., Tsang, J.C.

Materials Research Society
8 Conference Proceedings CHEMICAL VAPOR DEPOSITION OF GOLD

Larson, C.E., Baum, T.H., Jackson, R.L.

Materials Research Society
3 Conference Proceedings Microstructure of Chemical Vapor Transport Deposition Single Crystal Tungsten Coating Working at 1600° C

H.T. Huang, Y.F. Wei, J.P. Zheng, C.W. Tan

Trans Tech Publications
9 Conference Proceedings Impact of Rapid Thermal Annealing of Ti-TiN Bilayers on Subsequent Chemical Vapor Deposition of Tungsten

Mouroux, A., Palmans, R., Keinonen, J., Zhang, S.-L., Maex, K., Petersson, C. S.

MRS - Materials Research Society
4 Conference Proceedings Manufacturing issues in copper chemical vapor deposition processes

T. Nguyen, L.R. Allen, S.-T. Hsu

Society of Photo-optical Instrumentation Engineers
10 Conference Proceedings Organometallic Chemical Vapor Deposition of (BaSr)TiO3 Ferroelectric Thin Films

Wessels, B.W., Wills, L.A., Lu, H.A., Gilbert, S.R., Neumayer, D.A., Schulz, D.L., Marks, T.J.

Electrochemical Society
5 Conference Proceedings Uniform Deposition of Chemical Vapor Deposition Diamond Films on Slender Tungsten Wires

X.C. Wang, X.T. Shen, T.Q. Zhao, F.H. Sun, B. Shen

Trans Tech Publications
11 Conference Proceedings Programmed Rate and Optimal-Control Chemical Vapor Deposition of Tungsten

Kristof, J., Song, L., Tsakalis, K., Cale, T.S.

Electrochemical Society
6 Conference Proceedings ArF LASER-INDUCED CHEMICAL-VAPOR DEPOSITION OF TUNGSTEN FOR GATE ELECTRODES

Matsuhashi, H., Nishikawa, S., Ohno, S.

Materials Research Society
12 Conference Proceedings Characterization of tungsten silicide(WSix)film grown by chemical vapor deposition(CVD)

Hossain,F.R., Ambadi,S., Winer,R., Kitt,K., Garcia,C., Pearse,J.

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12