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Selective Nucleation and Area Selective OMCVD of Gold on Pattemed Self-Assembled Organic Monolayers: A Comparison of OMCVD and PVD

Author(s):
Fischer, R.A.
Winier, C.
Weckenmann, U.
Klashantmer, J.
Scheumnann, V.
Mittiler, S.
1 more
Publication title:
CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-13
Pub. Year:
2000
Page(from):
474
Page(to):
488
Pages:
15
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772785 [1566772788]
Language:
English
Call no.:
E23400/200013
Type:
Conference Proceedings

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