CVD of SiC from CH3SiCl3 in a Hot-Wall-Reactor System: Transport Pheonomena and Kinetic Aspects
- Author(s):
Wunder, V.K. Popovska, N. Gerltard, H. Emig, G. Kaufiuann, P. Kadinski, L. Dursi, F. - Publication title:
- CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2000-13
- Pub. Year:
- 2000
- Page(from):
- 224
- Page(to):
- 231
- Pages:
- 8
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772785 [1566772788]
- Language:
- English
- Call no.:
- E23400/200013
- Type:
- Conference Proceedings
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