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Effect of Gas Phase Nucleation on Silicon Carbide Chemical Vapor Deposition

Author(s):
Vorobev, A.N.
Komissarov, A.E.
Bogdanov, M.V.
Karpov, S.Yu.
Lovisus, A.A.
Makarov, Yu.N.
Lowsy, S.A.
2 more
Publication title:
CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-13
Pub. date:
2000
Page(from):
216
Page(to):
223
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772785 [1566772788]
Language:
English
Call no.:
E23400/200013
Type:
Conference Proceedings

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