Blank Cover Image

Novel High Ramp-Down Rate and Reflector Design in Rapid Thermal Processing

Author(s):
Publication title:
Rapid thermal and other short-time processing technologies : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-9
Pub. Year:
2000
Page(from):
437
Page(to):
444
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772747 [1566772745]
Language:
English
Call no.:
E23400/2000-9
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Metal-Oxide-Silicon Light Emitting Diodes Prepared by Rapid Thermal Oxidation

Liu, C.W., Liu, Y.H., Lin, C.H., Lee, M.H., Chen, M.J., Lin, C.F.

Electrochemical Society
7 Conference Proceedings Dynamic Model Based on Genetic Algorithms of Prediction for the Thermal Deformation of Machine Tools

Chang, C.W., Chu, M.H., Chen, Y.W., Chien, S.Y., Kang, Y.

Trans Tech Publications
2 Conference Proceedings High Ramp Rate Rapid Thermal Annealing for Ultra-Shallow Junctions

Kohli, P., Li, H.-J., Ganguly, S., Kirichenko, T., Murto, B., Graetz, E., Zeitzoff, P., Pawlik, M., Merrill, P.B., …

Electrochemical Society
8 Conference Proceedings High-growth-rate epitaxy of InN film by a novel-design MOCVD

Yang,F.-H., Yang,Y.-J., Hwang,J.-H., Lee,C.-H., Chen,K.-H., Lin,C.-Y.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings Strain Relaxation of Si! Si1-x-yGexCy/Si Quantum Wells Grown by RTCVD

Lee, M.H, Fseng, Y.D., Liu, C.W., Chern, M.Y.

Electrochemical Society
9 Conference Proceedings Design considerations of IRST system

Venkateswarlu, R., Er, M.H., Tam, S.C., Chan, C.W., Choo, L.C.

SPIE
4 Conference Proceedings Formation and Thermal Stability of Ni/Wsi/Ti/Pt Composite Ohmic Contacts to n-SiC for High Power Device Applications

Cole, M.W., Joshi, P.C., Hubbard, C.W., Demaree, D.J., Wood, M.C., Ervin, M.H., Ren, F.

Electrochemical Society
10 Conference Proceedings Transient and static thermal behavior of high-power single-mode semiconductor lasers (Invited Paper)

Hu, M.H., Liu, X., Zah, C.-E.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Rapid Thermal Processing of III-Nitrides

Hong, J., Lee, J. W., Vartuli, C. B., MacKenzie, J. D., Donovan, S. M., Abernathy, C. R., Crockett, R. V., Pearton, S. …

MRS - Materials Research Society
11 Conference Proceedings Influence of Rapid Thermal Ramp Rate on Phase Transformation of Titanium Suicides

Hu, Y.Z., Tay, S.P., Yang, J., Thakur, R., Smith, P.M, Bailey, G.

Electrochemical Society
6 Conference Proceedings Compact plasma focus soft x-ray source with high repetition rate and high intensity (Invited paper)

Lee,S., Lee,P., Zhang,G.X., Feng,X., Serban,A., Liu,M.H., Wong,T.K.S., Selvam,C., Thang,A.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Rapid Thermal Silicidation in Silicon-Germanium and SOI Devices

Chen, Li., Wu, W.W, Liu, C.H., Chiang, T.F., Cheng, S.L., Lee, S.W.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12