Blank Cover Image

High Performance, Highly Reliable Gate Oxide Formed with Rapid Thermal Oxidation In-Situ Steam Generation (ISSG) Technique

Author(s):
Ma, Y.
Chen, Y.N.
Brown, M.M
Li, F.
Chen, Y.
Eng, J., Jr.
Opila, R.L.
Chabal, Y.J.
Sapjeta, J.
Muller, D.A.
Xing, G.C.
Trowbridge, T.
Khau, M.
Tam, N.
9 more
Publication title:
Rapid thermal and other short-time processing technologies : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-9
Pub. date:
2000
Page(from):
179
Page(to):
186
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772747 [1566772745]
Language:
English
Call no.:
E23400/2000-9
Type:
Conference Proceedings

Similar Items:

Al-Shareef, Husam N., Karamcheti, A., Luo, T.T., Brown, G.A., Watt, V.H.C., Jackson, M.D., Huff, H.R., Jallepally, R., …

Materials Research Society

Weldon, M.K., Marsico, V.E., Chabal, Y.J., Agarwal, A., Eaglesham, D.J., Sapjeta, J., Brown, W.L., Jacobson, D.C., …

Electrochemical Society

Eng, Joseph, Jr., Opila, Robert L., Chabal, Yves J., Rosamilia, Joseph M., Green, Martin L.

Electrochemical Society

Muller, A.J., Opila, R.L., Krautter, H.W., Chandross, E.A.

Electrochemical Society

Chang, J.P., Green, M.L., Opila, R.L., Eng, J.

Electrochemical Society

B. Gila, M. Hlad, T. Anderson, J. Chen, K. Allums, A. Gerger, A. Herrero, S. Jang, B. Kang, C. R. Abernathy, F. Ren, S. …

Electrochemical Society

Chang, J.P., Sapjeta, J., Rosamilia, J.M., Boone, T., Eng, J., Jr., Opila, R.L., Brennan, S., Wiemer, C., Pianetta, P.

Electrochemical Society

Sapjeta, J., Green, M. L., Chang, J. P., Silverman, P. J., Sorsch, T. W., Weir, B. E., Gladden, W., Ma, Y., Sung, C. Y., …

MRS - Materials Research Society

Watt, V.H.C., Torres, K., Jackson, M.D., Huff, H.R., Abmed, K., Jallepally, R., Noble, D., Toni, N., Miner, G.

Electrochemical Society

Chang, J.P., Case, C.B., Krautter, H.W., Sapjeta, J., Opila, R.L., Decker, M.A.

Electrochemical Society

Chang, J.P., Eng, J., Jr., Sapjeta, J., Opila, R.L., Cox, P., Pianetta, P.

Electrochemical Society

Shiozski, K., Okasaka, K., Nakano, J., Kolde, H.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12