Oxidation and Dissolution Characteristics of Tungsten: Application To Chemical Mechanical Polishing

Oxidation and Dissolution Characteristics of Tungsten: Application To Chemical Mechanical Polishing

Author(s):

Publication title:

Electrochemical processing in ULSI fabrication III : proceedings of the international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2000-8

Pub. Year:

2000

Page(from):

234

Page(to):

243

Pages:

10

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772730 [1566772737]

Language:

English

Call no.:

E23400/2000-8

Type:

Conference Proceedings

Details

TDL ID:	ZA00013977
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Electrochemical Processing in ULSI Fabrication ; Meeting of the Electrochemical Society
Conf. info. (Number):	3rd ; 197th
Conf. info. (Venue):	Toronto, Canada
Conf. info. (Date):	2000.05.14-2000.05.19

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