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Model of Superfilling in Damascene Electroplating: Comparison of Experimental Feature Filling with Model Predictions

Author(s):
Deligianni, H.
Horkans, J.
Kwietniak, K.
Dukovic, J.O.
Andricacos, P.C.
Boettcher, S.
Seo, S.-C.
Locke, P.
Simon, A.
Seymour, S.
Malhotra, S.
6 more
Publication title:
Electrochemical processing in ULSI fabrication III : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-8
Pub. Year:
2000
Page(from):
145
Page(to):
160
Pages:
16
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772730 [1566772737]
Language:
English
Call no.:
E23400/2000-8
Type:
Conference Proceedings

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