Blank Cover Image

Superconformal Electrodeposition of Copper

Author(s):
Moffat, T.P.
Bonevich, J.E.
Huber, W.H.
Stanishevshky, A
Kelly, D.R.
Stafford, G.R.
Josell, D.
2 more
Publication title:
Electrochemical processing in ULSI fabrication III : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-8
Pub. Year:
2000
Page(from):
1
Page(to):
12
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772730 [1566772737]
Language:
English
Call no.:
E23400/2000-8
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Iridium Barriers for Direct Copper Electrodeposition in Damascene Processing

D. Josell, J. Bonevich, T. Moffat, T. Aaltonen, M. Ritala, M. Leskelä

Electrochemical Society
7 Conference Proceedings Quantifying Competitive Adsorption Dynamics in Superfilling Electrolytes

Moffat, T.P., Wheeler, D., Josell, D.

Electrochemical Society
2 Conference Proceedings Superconformal Electrodeposition Using Derivitized Substrates

Moffat, T.P., Wheeler, D., Wjtt., C., Jasell, D.

Electrochemical Society
8 Conference Proceedings Control of Overfill Bumps in Damascene Cu Electrodeposition

T. Moffat, S. Kim, D. Josell

Electrochemical Society
3 Conference Proceedings The Influence of Additives on the Room-Temperature Recrystallization of Electrodeposited Copper*

Stafford, G.R., Vaudin, M.D., Moffat, T.P., Armstrong, N., Javic, V.D., Kelley, D.R.

Electrochemical Society
9 Conference Proceedings Quantifying Superconformal Filling of Submicrometer Features Through Surfactant Catalyzed Chemical Vapor Deposition

Josell, D., Kim, S., Wheeler, D., Moffat, T., Pyo, S.

Electrochemical Society
4 Conference Proceedings The Electrodeposition of Al-Cu Alloys from Room-Temperature Chloroaluminate Electrolytes

Stafford, G.R., Jovic, V.D., Moffat, T.P., Zhu, Q., Jones, S., Hussey, C.L.

Electrochemical Society
10 Conference Proceedings The Electrodeposition of Aluminum-Manganese Alloys from Room-Temperature Chloroaluminate Molten Salts

De Long, H.C., Mitchell, J.A., Hagans, P.L., Carlin, R.T., Stafford, G.R., Trulove, P.C.

Electrochemical Society
5 Conference Proceedings Copper Electrodeposition on Osmium: A Potential Barrier for Damascene Processing

D. Josell, C. A. Witt, T. Moffat

Electrochemical Society
11 Conference Proceedings Corrosion of Electrodeposited Aluminum-Manganese Alloys

T. P. Moffat, G. R. Stafford, D. E. Hall

Electrochemical Society
6 Conference Proceedings Superconformal Film Growth: Mechanism and Quantification

T. Moffat, D. Wheeler, D. Josell

Electrochemical Society
12 Conference Proceedings Electrodeposition and Pitting Corrosion of Aluminum-Manganese Alloys from Room Temperature Chloroaluminate Molten Salts

Trulove, P.C., Mitchell, J.A., Hagans, P.L., Carlin, R.T., Stafford, G.R., De Long, H.C.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12