Blank Cover Image

Gas Phase Analysis of TiC and TiN Plasma Enhanced CVD Processes by Molecular Beam Mass Spectrometry

Author(s):
Publication title:
Plasma processing XIII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-6
Pub. Year:
2000
Page(from):
48
Page(to):
57
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772716 [1566772710]
Language:
English
Call no.:
E23400/2000-6
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Gas Phase Analysis of TiCl4 and NH3 Plasma Processes by Molecular Beam Mass Spectrometry

Reddy, C.M., Amato-Wierda, C.

Electrochemical Society
7 Conference Proceedings CVD of carbide multi-phased coatings

Versprille, K. E., Ji, Hua Xia, Amato-Wierda, C. C., Ramsey, P. J., Wierda, D. A.

MRS-Materials Research Society
2 Conference Proceedings Molecular beam mass spectrometry studies of the thermal decomposition of tetrakis(dimethylamino)titanium

Amato-Wierda, Carmela C., Norton, Edward T. Jr., Wierda, Derk A.

MRS-Materials Research Society
8 Conference Proceedings Characterization of Ti-W-C Thin Films Deposited by CVD

Amato-Wierda, C.C., Ji, H.X.

Electrochemical Society
3 Conference Proceedings In-Situ-Gas Phase Analysis during Silicon Thin Film Deposition: Molecular Beam Sampling, Laser Ionization and Mass Spectrometry

Stafast, H., Falk, F., Witkowicz, E.

Electrochemical Society
9 Conference Proceedings Factors Affecting the Amount of Carbon in Titanium Carbide Filnss Made by CVD

Amato-Wierda, C.C., Versprille, K.E., Rantsey, P.

Electrochemical Society
4 Conference Proceedings Molecular Beam Mass Spectronactry Studies of the Thermal Decomposition of Tetrakis(Dinsethylamino)Titattium

Wierda, C.C.Amato-, Norton, E.T., Jr

Electrochemical Society
10 Conference Proceedings Comparative Study of Solid-Phase Crystallization of Amorphous Silicon Deposited by Hot-Wire CVD, Plasma-Enhanced CVD, and Electron-Beam Evaporation

Paul Stradins, Oliver Kunz, David L. Young, Yanfa Yan, Kim M. Jones, Yueqin Xu, Robert C. Reedy, Howard M. Branz, Armin …

Materials Research Society
5 Conference Proceedings Kinetic and Mechanistic Studies of the Thermal Decomposition of Tetraethoxysilane(TEOS) in a Flow Reactor Coupled to a Molecular Beam Mass Spectrometer

Amato-Wierda, C., Zachriah, M.R., Burgess, D.R.F.

Electrochemical Society
11 Conference Proceedings Plasma Enhanced CVD Process Using a Dual Magnetron as Plasma Source

C. Charton, M. Fahland, N. Schiller

Society of Vacuum Coaters
6 Conference Proceedings Molecular beam static secondary ion mass spectrometry for surface analysis

A.D. Appelhans, G.S. Groenewold, J.C. Ingram, D.A. Dahl, J.E. Delmore

Society of Photo-optical Instrumentation Engineers
12 Conference Proceedings Quantitative Analysis of Eicosanoids by Gas Chromatography Mass-Spectrometry

Catella F., Johnson M. J., FitzGerald A. G.

Plenum Press
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12