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Studies of High-k Gate Dielectrics Deposited hy the Liquid Source Misted Chemical Deposition Method

Author(s):
Lee, D. ( (Penn State University) )
Roman, P. ( (Penn State University) )
Mumbauer, P. ( (PRIMAXX, Inc.) )
Grant, R. ( (PRIMAXX, Inc.) )
Horn, M. ( (Penn State University) )
Ruzyllo, J. ( (Penn State University) )
1 more
Publication title:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-5
Pub. date:
2000
Page(from):
237
Page(to):
242
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772709 [1566772702]
Language:
English
Call no.:
E23400/2000-5
Type:
Conference Proceedings

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