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Characterization of Gd2O3 Films Deposited on Si(l00) by E-Beam Evaporation from Pressed-Powder Targets

Author(s):
Landheer, D. ( (National Research Council of Canada) )
Gupta, J. ( (National Research Council of Canada) )
Hulse, J. ( (National Research Council of Canada) )
Sproule, I. ( (National Research Council of Canada) )
McCaffrey, J. ( (National Research Council of Canada) )
Graham, M. ( (National Research Council of Canada) )
Yang, K.-C. ( (University of Toronto) )
Lu, Z. ( (University of Toronto) )
Lennard, W.N. ( (University of Western Ontario) )
4 more
Publication title:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-5
Pub. date:
2000
Page(from):
193
Page(to):
204
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772709 [1566772702]
Language:
English
Call no.:
E23400/2000-5
Type:
Conference Proceedings

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