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Characterization of High-K Dielectrics Using the Non-Contact Surface Charge Profiler (SCP) Method

Author(s):
Roman, P. ( (Penn State University) )
Lee, D. ( (Penn State University) )
Mumbauer, P. ( (PRIMAXX, Inc.) )
Grant, R. ( (PRIMAXX, Inc.) )
Kamieniecki, E. ( (QC Solutions, Inc.) )
Ruzyllo, J. ( (Penn State University) )
1 more
Publication title:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-5
Pub. date:
2000
Page(from):
187
Page(to):
192
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772709 [1566772702]
Language:
English
Call no.:
E23400/2000-5
Type:
Conference Proceedings

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