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Improvement in the Characteristics of Post-CMP Low-k Methylsilsesquioxane(MSQ)

Author(s):
Chrang, T.-C. ( (National Sun Yat-Sen University) )
Liu, P.-T. ( (National Chiao Tung University) )
Huang, M.-C. ( (National Chiao Tung University) )
Tsai, T.-M. ( (Nation Tsing Hua University) )
Hsu, K.-C. ( (National Chiao Tung University) )
Yang, Y.-L. ( (National Nano Device Laboratory) )
Sze, S.M. ( (National Chiao rung University) )
Chung, H. ( (Allied Signal inc. Taiwan) )
Hou, J. ( (Allied Signal inc. Taiwan) )
4 more
Publication title:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-5
Pub. Year:
2000
Page(from):
114
Page(to):
132
Pages:
19
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772709 [1566772702]
Language:
English
Call no.:
E23400/2000-5
Type:
Conference Proceedings

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