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A Study on the Formation and Characteristics of a-Fluoronated Carbon Films by CF4/CH4-JCPCVD

Author(s):
  • Kang, M.S. ( (Cheju National University) )
  • Oh, K.S. ( (Cheju National University) )
  • Choi, C.K. ( (Cheju National University) )
  • Um, S.H. ( (Korea Advanced Institute of Science and Technology) )
  • Chang, H.Y. ( (Korea Advanced Institute of Science and Technology) )
Publication title:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-5
Pub. date:
2000
Page(from):
90
Page(to):
102
Pages:
13
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772709 [1566772702]
Language:
English
Call no.:
E23400/2000-5
Type:
Conference Proceedings

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