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Enhancement of Organic Low-k Hybrid-Organic-SiloXane-Polymer (HOSP) in Resisting Oxygen Plasma Process

Author(s):
Chang, T.-C. ( (National Sun Yat-Sen University) )
Liu, P.-T. ( (National Chiao Tung University) )
Su, H. ( (National Chiao Tung University) )
Chang, C.-F. ( (National Chiao Tung University) )
Yang, Y.-L. ( (National Nano Device Laboratory) )
Sze, S.M. ( (National Nano Device Laboratory) )
Hou, J. ( (Allied Signal inc. Taiwan) )
Chung, H. ( (Allied Signal inc. Taiwan) )
3 more
Publication title:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-5
Pub. Year:
2000
Page(from):
72
Page(to):
89
Pages:
18
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772709 [1566772702]
Language:
English
Call no.:
E23400/2000-5
Type:
Conference Proceedings

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