Blank Cover Image

Low Dielectric Constant Material Deposited by HDPCVD for Barrier and Etch Stop Application in Cu Damascene Structure

Author(s):
Publication title:
Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-5
Pub. Year:
2000
Page(from):
48
Page(to):
54
Pages:
7
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772709 [1566772702]
Language:
English
Call no.:
E23400/2000-5
Type:
Conference Proceedings

Similar Items:

M'Saad, H., Cho, S., Vellaikal, M., Li, Z.

Materials Research Society

Jang, S.M., Jeng, S.M., Chang, W., Li, L.J., Lin, C.C., Yu, C.H., Liang, M.S.

Electrochemical Society

Lee, Albert S., Lakshmanan, Annamalai, Rajagopalan, Nagarajan, Cui, Zhenjiang, Le, Maggie, Xia, Li Qun, Kim, Bok Heon, …

Materials Research Society

Cho, T., Hay, M., Ho, P. S., Morgen, M., Zhao, J-H.

Materials Research Society

Prasad, K., Yuan, X.L., Tan, C.M., Zhang, D.H., Li, C. Y., Wang, S.R., Yuan, S.Y.J., Xie, J.L., Gui, D., Foo, P.D.

Materials Research Society

Chang, C.K., Tsang, C.F., Nguyen, V., Zhang, Q., Foo, T.H.

Electrochemical Society

Lee, Albert, Rajagopalan, Nagarajan, Le, Maggie, Kim, Bok Heon, M’Saad, Hichem

Materials Research Society

Nalva, H.S., Suzuki, M., Takahashi, A., Kageyama, A.

Electrochemical Society

M'saad, H., Vellaikal, M., Zhang, L., Witty, D.

MRS - Materials Research Society

Shieh,J.-M., Wei,T.C., Liu,C.H., Suen,S.-C., Dai,B.-T.

SPIE-The International Society for Optical Engineering

Kiene, M., Abramowitz, P. P., Ho, P. S.

MRS - Materials Research Society

Rajagopalan, G., Taylor, A., Foster, C., Bass, S., Morey, I., Flanner, J., Elfingboe, S.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12