Blank Cover Image

CMP Integration Issues for Sub-0.l5μm Process Technologies

Author(s):
Publication title:
Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-37
Pub. Year:
1999
Page(from):
517
Page(to):
533
Pages:
17
Pub. info.:
Pennington, N. J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772600 [1566772605]
Language:
English
Call no.:
E23400/99-37
Type:
Conference Proceedings

Similar Items:

Pramanik, D., Weling, M., Lin, X.-W.

Electrochemical Society

Weling, M., Bothra, S., Qian, L., Sethi, S., Pramanik, D.

Electrochemical Society

Weling, M., Lin, X.-W.

Electrochemical Society

Weling, Milind, Jain, Vivek

Materials Research Society

Dunton, Vance, Szarka, Frank

Electrochemical Society

Tsai, T.C., flu, S.C., Lin, Z.H., Hsu, S.H., Hsu, C.L., Dai, J., Yang, F., Lin, M.H., Chen, H.C., Hsieh, W.Y.

Electrochemical Society

Zhang, Liming, Cecchi, Michele, Weling, Milind, Tafari, Tekle

Electrochemical Society

Yota,J., Brongo,M.R., Dyer,T.W., Rafftesaeth,K.P., Bondur,J.A.

SPIE-The International Society for Optical Engineering

Annapragada, R., Bothra, S.

Electrochemical Society

Sugii, Toshihiro, Pidin, Sergey, Momiyama, Youichi, Goto, Ken-ichi, Tanaka, Takuji, Yamamoto, Tomonari, Futatugi, …

Materials Research Society

Pramanik, D., Weling, M.

Electrochemical Society

Blumenthal, R., Braekelmann, G., Cave, N. G., Conner, J., Crabtree, P., Defilippi, J., Denning, D., Farkas, J., …

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12