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Silicon Nitride Polish-Stop for CMP of BPSG Films on sub-0.25μm DRAMs

Author(s):
Stephens, J.
Dobuzinsky, D.
Gambina, J.
Glashauser, W.
Huckels, K.
Hanebeck, J.
Kraxenberger, M.
Naeem, M.
Rupp, T.
Sardesai, V.
Wangemann, K.
Wise, M.
7 more
Publication title:
Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-37
Pub. Year:
1999
Page(from):
234
Page(to):
238
Pages:
5
Pub. info.:
Pennington, N. J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772600 [1566772605]
Language:
English
Call no.:
E23400/99-37
Type:
Conference Proceedings

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