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METHOD FOR EVALUATION AND OPTIMIZATION OF PARTICLE REMOVAL PROCESSES

Author(s):
Narayanswami, N.
Ruether, P.A.
Thomes, G.
Weygand, J.F.
Lee, N.-P.
Christenson, K.K.
Butterbaugh, J.W.
Hoo, S.H.
Liu, B.Y.H.
4 more
Publication title:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-36
Pub. Year:
1999
Page(from):
469
Page(to):
476
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772594 [1566772591]
Language:
English
Call no.:
E23400/99-36
Type:
Conference Proceedings

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