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EVALUATION OF OZONATED WATER SPRAY FOR RESIST CLEANING APPLICATIONS

Author(s):
De Gendt, S.
Lux, M.
Claes, M.
Van Hoeymissen, J.
Conrad, T.
Worth, W.
Lagrange, S.
Bergman, E.
Jassal, A.S.
Mertens, P.W.
Heyns, M.M.
6 more
Publication title:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-36
Pub. Year:
1999
Page(from):
391
Page(to):
398
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772594 [1566772591]
Language:
English
Call no.:
E23400/99-36
Type:
Conference Proceedings

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