Blank Cover Image

CARRIER INDUCED SILICON PITTING IN THE HF-RCA CLEANING SEQUENCES

Author(s):
Publication title:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-36
Pub. Year:
1999
Page(from):
173
Page(to):
179
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772594 [1566772591]
Language:
English
Call no.:
E23400/99-36
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings EFFECT OF WAFER BACKSIDE ON PARTICLE ADDITION BEHAVIOUR OF HF-RCA SEQUENCE

Strada, M., Lodi, D., Bellandi, E., Alessandri, M.

Electrochemical Society
7 Conference Proceedings ANALYSIS OF THE HF-ETHANOL CLEANING PROCESS ON SILICON WAFERS WITH 100 VICINAL SURFACES

Portillo, J., Gual, J., Sarrabayrouse, G., Morante, J. R.

MRS - Materials Research Society
2 Conference Proceedings THE ST CLEAN DUAL STEP CLEANING CONCEPT

Bellandi, R., Alessandri, M., Lodi, D., Pipia, F.

Electrochemical Society
8 Conference Proceedings HF Last Cleaning Before Silicon Epitaxy

Patruno, P., Fleury, A., Wyborn, H., Andre, E., Tardif, F.

Electrochemical Society
3 Conference Proceedings RCA Clean Optimization

Raley, B., Molloy, J., Taylor-Burton, B.

Electrochemical Society
9 Conference Proceedings The Influence of HF, 0H, and Dissolved 02 on Silicon Surface Chemical Cleaning

Higashi, G.S., Chabal, Y.J., Raghavachari, K., Becker, R.S., Green, M.P., Hanson, K., Boone, T., Eisenberg, J.H., Shive, …

Electrochemical Society
4 Conference Proceedings PREVENTION OF Si ETCHING IN DILUTED SC1 SOLUTIONS

Bellandi, E., Alessandri, M., Lodi, D., Strada, M., Pipia, S., Petitdidier, S., Levy, D.

Electrochemical Society
10 Conference Proceedings Accurate HF carrier estimation

Nelson, D. J., Marasovich, J. A.

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Investigation of Single-Wafer, Low Temperature Epitaxial Silicon Deposition with Clustered HF Pre- Clean

Wise, R., Frystak, D., Barnett, J., Grothe, P., Fowler, B., Forest, E.

Electrochemical Society
11 Conference Proceedings AFM Analysis of HF Vapor Cleaned SiO2 Surfaces

Carter,R. J., Bergman, E. J., Lee, D. R., Owyang, J., Nemanich, R. J.

MRS - Materials Research Society
6 Conference Proceedings SILICON CRITICAL CLEANING WITH OZONE, HF AND HCL IN A SPRAY PROCESSOR

Butterbaugh, J.W., Olson, E.D., Reaux, C.A.

Electrochemical Society
12 Conference Proceedings METASTABLE PITTING CORROSION OF ALUMINUM, Al-Cu, AND Al-Si THIN FILMS IN DILUTE HF SOLUTIONS AND ITS RELEVANCY TO THE PROCESSING OF INTEGRATED CIRCUIT …

Scully, J. R., Peebles, D. E.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12