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LOW-TEMPERATURE ATMOSPHERIC AMBIENT RAPID LAMP CLEANING OF SILICON SURFACES

Author(s):
Roman, P.
Tsai, C.-L.
Hengstebeck, R.
Pantano, C.
Berry, J.
Kamieniecki, E.
Ruzyllo, J.
2 more
Publication title:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-36
Pub. date:
1999
Page(from):
145
Page(to):
149
Pages:
5
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772594 [1566772591]
Language:
English
Call no.:
E23400/99-36
Type:
Conference Proceedings

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