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Relaxation Mechanisms of Strained SiGe Films Bonded to High and Low Viscosity Oxides

Author(s):
Hobart, K.D.
Kub, F.J.
Fatemi, M.
Twigg, M.E.
Thompson, P.E.
Kuan, T.S.
Inoki, C.K.
2 more
Publication title:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-35
Pub. Year:
1999
Page(from):
85
Page(to):
91
Pages:
7
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772587 [1566772583]
Language:
English
Call no.:
E23400/99-35
Type:
Conference Proceedings

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