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Microstructures in Diamond for DMEMS, Diamond Micro Electromechanical Systems

Author(s):
Holmes, K.C.
Wisitsora-at, A.
Henderson, T.G.
Davidson, J.L.
Kang, W.P.
Pulugurta, V.
1 more
Publication title:
Diamond materials : proceedings of the sixth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-32
Pub. Year:
1999
Page(from):
360
Page(to):
368
Pages:
9
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772556 [1566772559]
Language:
English
Call no.:
E23400/99-32
Type:
Conference Proceedings

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