Blank Cover Image

Effect of High Temperature RTA on Precipitate Formation and the COP Dissolution

Author(s):
Park, J.G.
Park, H.P.
Lee, G.S.
Kwack, K.D.
Ryu, K.B.
Park, J.M.
1 more
Publication title:
ULSI process integration : proceedings of the first international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-18
Pub. Year:
1999
Page(from):
157
Page(to):
166
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772419 [1566772419]
Language:
English
Call no.:
E23400/99-18
Type:
Conference Proceedings

Similar Items:

Lee, G.S., Kwack, K.D., Park, J.G., Park, J.M., Shim, T.H.

Electrochemical Society

Kang, S.W., Kim, K.B., Lee, D.Y., Mun, J.H., Yoon, E.P.

Trans Tech Publications

Park, J.G., Lee, G.S., Park, J.M., Chon, S.M., Chung, H.K.

Electrochemical Society

Jeong, C.-Y., Park, K.-Y., Choi, J.S., Lee, J.G., Lee, D.-H.

SPIE-The International Society for Optical Engineering

Park, J.G., Park, J.M., Cho, K.C., Lee, G.S., Chung, H.K.

Electrochemical Society

Lee, J., Lee, I., Chung, H., Ahn, J.G., Kim, D.J., Kim, B.

Trans Tech Publications

Jo, N.H., Yoo, S.D., Ko, B.G., Lee, S.W., Jang, J., Lee, S.D., Kwack, K.D.

SPIE

I.G. Yeo, T.W. Lee, J.H. Park, W.S. Yang, H.B. Ryu

Trans Tech Publications

5 Conference Proceedings Electron mobility modeling in HgCdTe

Yoo, S.D., Jo, N.H., Ko, B.G., Rho, J.S., Lee, S.D., Kwack, K.D.

SPIE

Lee, D.W., Won, J.H., Kim, K.H., Matsushita, J., Shim, K.B.

Materials Research Society

Yu, S.H., Jung, B.H., Lee, K.B., Kim, H.D., Paik, J.S., Ko, C.G., Cho, S.H.

Electrochemical Society

Hong, Y.K., Eom, D.H., Lee, S.H., Park, J.G., Busnaina, A.A.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12