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Trends in SiGe BiCMOS Process Integration

Author(s):
Harame, D.
Subbanna, S.
Dunn, J.
St Onge, S.A.
Freeman, G.
Malinowski, J.
Groves, R.
Joseph, A.
Ahlgren, D.
Johnson, R.
Zierak, M.
Coolbaugh, D.
7 more
Publication title:
ULSI process integration : proceedings of the first international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-18
Pub. date:
1999
Page(from):
143
Page(to):
146
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772419 [1566772419]
Language:
English
Call no.:
E23400/99-18
Type:
Conference Proceedings

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