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Silicon Epitaxy and Its Application to RF ICs

Author(s):
Ohguro, T.
Naruse, H.
Sugaya, H.
Nakamura, S.
Sugiyama, N.
Morifuji, E.
Kimijima, H.
Yoshitomi, T.
Morimoto, T.
Momose, H.S.
Katsumata, Y.
Iwai, H.
7 more
Publication title:
ULSI process integration : proceedings of the first international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-18
Pub. Year:
1999
Page(from):
123
Page(to):
142
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772419 [1566772419]
Language:
English
Call no.:
E23400/99-18
Type:
Conference Proceedings

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