Blank Cover Image

Recent Developments in Ultratlsin Nitride Gate Stack Prepared by In-Situ RTP Multiprocessing for CMOS ULSI

Author(s):
Song, S.C.
Kini, B.Y.
Loan, H.F.
Kwong, D.-L.
Gardner, M.
Fulford, J.
Wristers, D.
Gelpey, J.
Marcus, S.
4 more
Publication title:
Advances in rapid thermal processing : proceedings of the symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-10
Pub. date:
1999
Page(from):
45
Page(to):
56
Pages:
12
Pub. info.:
Pennington, N. J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772327 [156677232X]
Language:
English
Call no.:
E23400/99-10
Type:
Conference Proceedings

Similar Items:

Bhat, M., Yoon, G.W., Kim, J., Han, L,K., Yan, J., Wristers, D., Kwong, D.L.

Electrochemical Society

Bhat, M., Cho, T.H., Yan, J., Han, L.K., Kwong, D.L.

Electrochemical Society

Kim, Y.H., Song, S.C., Luan, H.F., Gelpey, J.C., Kepton, A., Levy, S., Bloom, R., Kwong, D.-L.

Electrochemical Society

Song, S. C., Lee, C. H., Luan, H. F., Kwong, D. L., Gardner, M., Fulford, J., Allen, M., Bloom, J., Evans, R.

MRS - Materials Research Society

Wang,H.H., Han,L.K., Yan,J., Kwong,D.-L.

SPIE-The International Society for Optical Engineering

Song, S.C., Bersuker, G., Zhang, Z., Lee, B.H., Huffman, C., Bae, S.H., Sim, J.H., Kirsch, P., Majhi, P., Moumen, N,, …

Electrochemical Society

Song, S. C., Luan, H. F., Gardner, M., Fulford, J., Allen, M., Kwong, D. L.

MRS - Materials Research Society

Ting, W., Ahn, J., Kwong, D. L.

Materials Research Society

Yan,J., Han,L.K., Kwong,D.-L.

SPIE-The International Society for Optical Engineering

Lee, S.J., Luan, H.F., Lee, C.H, Senzoki, Y, Roberts, D., Kwong, D.-L.

Electrochemical Society

Han, L. K., Bhat, M., Yan, J., Wristers, D., Kwong, D. L.

MRS - Materials Research Society

Ting, W., Lin, S. N., Kwong, D. L.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12