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Enabling Single-Wafer Process Technologies for Reliable Ultra-Thin Gate Dielectrics

Author(s):
Miner, G.
Xing, G.
Joo, H.S.
Sonchez, F.
Yokoa, Y.
Chen, C.
Lopes, D.
Balakrishna, A.
3 more
Publication title:
Advances in rapid thermal processing : proceedings of the symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-10
Pub. date:
1999
Page(from):
3
Page(to):
14
Pages:
12
Pub. info.:
Pennington, N. J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772327 [156677232X]
Language:
English
Call no.:
E23400/99-10
Type:
Conference Proceedings

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