Long-Term Evaluation of a Litmas 'Blue' Inductively-Coupled Plasma Device for Point-of-Use PFC and HFC Abatement
- Author(s):
Vartanian, V. ( Motorola ) Beu, L. ( Motorola ) Stephens, T. ( Motorola ) Jewett, R. ( Litmas, Inc. ) Tonnis, E. ( University of Calofornia at Berleley ) Graves, D. ( University of Calofornia at Berleley ) - Publication title:
- Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 99-8
- Pub. Year:
- 1999
- Page(from):
- 103
- Page(to):
- 115
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772303 [1566772303]
- Language:
- English
- Call no.:
- E23400/99-8
- Type:
- Conference Proceedings
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