Blank Cover Image

Low Dielectric Polymer Etching with Downstream Microwave Plasma

Author(s):
Publication title:
Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues, proceedings of the fourth International Symposium and Thin Film Materials for Advanced Packaging Technologies : proceedings of the second International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-7
Pub. Year:
1999
Page(from):
32
Page(to):
37
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772297 [156677229X]
Language:
English
Call no.:
E23400/99-7
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Low Dielectric Polymer Etching with a Down-stream Microwave Plasma

Beaudoin, Stephen, Callahan, Russell, Raupp, Gregory

American Institute of Chemical Engineers
7 Conference Proceedings IN SITU FTIR INVESTIGATIONS OF POLYMER SURFACE MODIFICATION IN DOWNSTREAM MICROWAVE PLASMA ETCHING

Leu, Jihperng, Jensen, K.F.

Materials Research Society
2 Conference Proceedings Wave Polymerization During Vapor Deposition of Porous Parylene-N Dielectric Films

Beaudoin, S. P., Erjavec, J., Raupp, G. B., Sikita, J.

Materials Research Society
8 Conference Proceedings IN SITU FTIR INVESTIGATIONS OF POLYMER SURFACE MODIFICATION IN DOWNSTREAM MICROWAVE PLASMA ETCHING

Leu, Jihperng, Jensen, K. F.

Materials Research Society
3 Conference Proceedings Remote Microwave Plasma Enhanced CVD of Low Dielectric Constant SiOxFy Films From FASi-4 and Oxygen

Virmani, M., Jin, Z., Leusink, G.J., Raupp, G.B., Cale, T.S., Laxman, R.K., Hochberg, A.K.

Electrochemical Society
9 Conference Proceedings Plasma Etching of Polymer Dielectric Films for Electronics Packaging

Andrew S. Dawson, Michael S.K. Chen, C. Christine Dong

Society of Photo-optical Instrumentation Engineers
4 Conference Proceedings Plasma Etching of Organic Low-Dielectric-Constant Polymers: Comparative Analysis

Baklanov, M. R., Vanhaelemeersch, S., Alaerts, C., Maex, K.

MRS - Materials Research Society
10 Conference Proceedings Plasma Polymerization of Low-Dielectric Constant Fluoro-Hydrocarbon Film

Lee, W. W., Tyndall, G., Zehringer, R., Crowder, M.

MRS - Materials Research Society
5 Conference Proceedings High-Density Plasma Etching of Low-Dielectric Constant Materials

Standaert, T. E. F. M., Matsuo, P. J., Allen, S. D., Oehrlein, G. S., Dalton, T. J., Lu, T.-M., Gutmann, R.

MRS - Materials Research Society
11 Conference Proceedings Application of Microwave Downstream Plasma for Cleaning: Post Via-Etch Residue Removal

Deshmukh, S., Burke, R., Chang, J., Cheng, C.C.

Electrochemical Society
6 Conference Proceedings Plasma Etching for the Application to Low-K Dielectrics Devices

J.W. Lee, H.W. Kim, J.W. Han, M.S. Kim, B.D. Yoo, M.H. Kim, C.H. Lee, C.H. Lim, S.K. Hwang, C. Lee, D.J. Chung, S.G. …

Trans Tech Publications
12 Conference Proceedings Integrated Modeling Investigation of Plasma Dielectric Etching Processes

Zhang, D., Rauf, S., Sparks, T.G., Ventzek, P.L.G.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12