Novel Uses of Silicon Dioxide in Deep- Submicron Device Fabrication
- Author(s):
- Publication title:
- Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 99-6
- Pub. Year:
- 1999
- Page(from):
- 225
- Page(to):
- 239
- Pages:
- 15
- Pub. info.:
- Pennington, New Jersey: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772280 [1566772281]
- Language:
- English
- Call no.:
- E23400/99-6
- Type:
- Conference Proceedings
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