Blank Cover Image

The effects of Matallic Contamination on Gate Oxide Integrity-Ti, W

Author(s):
Choi, H.
Park, C.
Yeo, I.
Kim, H.
Lee, S.
Kim, C.
1 more
Publication title:
Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-6
Pub. Year:
1999
Page(from):
45
Page(to):
49
Pages:
5
Pub. info.:
Pennington, New Jersey: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772280 [1566772281]
Language:
English
Call no.:
E23400/99-6
Type:
Conference Proceedings

Similar Items:

Lee, G.-S., Park, J. -G., Choi, S. -P., Shin, C.-H,, Sun, Y.-B, Kwak, Y.-S., Shin, C.-K., Smith, W. L., Hahn, S.

Materials Research Society

Nam, I.-H., Hong, S.I., Sim, J.S., Park, B.-G., Lee, J.D., Lee, S.-W., Kang, M.-S., Kim, Y.-W., Suh, K.-P.

Electrochemical Society

Park, J.-G., Rozgonyi, G.A., Lee, C.-S., Choi, S.-P.

Electrochemical Society

Vermeire, B., Peterson, C.A., Parks, H.G., Sarid, D.

Electrochemical Society

Choi, D.C., Choi, B.D., Jung, J.Y., Park, H.H., Seo, J.W., Lee, K.Y., Chung, H.K.

Materials Research Society

Jeon, J., Watanabe, S., Tanishima, M., Sugimoto, F., Ogle, B.

Electrochemical Society

Kim, S.-W., Lee, S.-W., Park, C.-M., Choi, S.-H., Lee, Y.-M., Kang, Y., Yeo, G.-S., Lee, J.-H., Cho, H.-K., Han, W.-S.

SPIE - The International Society of Optical Engineering

Hahn, S., Tung, C. Y., Lee, J., Tuomi, T., Partanen, J.

Materials Research Society

Lee, S.H., Lee, D-D., Kim, J-H., Shin, K-S., Park, H-S., Choi, H-S.

Electrochemical Society

Hahn, S., Tung, C. Y., Lee, J., Tuomi, T., Partnanen, J.

Materials Research Society

Lee, J., Tung, C.Y., Hahn, S., Chiao, P.

Materials Research Society

Joo, M.-S., Lee, S.-H., Cho, B.-J., Kim, J.-C., Choi, S.-H.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12