Blank Cover Image

Silicon Carbon Nitride Films Deposited by ECR CVD

Author(s):
Chen, K-H.
Wu, J.-J.
Wen, C.-Y.
Chen, L-C.
Fan, C.-W
Kuo, P.-F.
Chen, Y.-F.
Huang, Y.-S.
3 more
Publication title:
Proceedings of the State-of-the-Art Program on Compound Semiconductors (SOTAPOCs XXX)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-4
Pub. Year:
1999
Page(from):
13
Page(to):
24
Pages:
12
Pub. info.:
Pennington, N. J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772266 [1566772265]
Language:
English
Call no.:
E23400/99-4
Type:
Conference Proceedings

Similar Items:

Wen, C-Y., Wu, J-J., Lo, H. J., Chen, L. C., Chen, K. H., Lin, S. T., Yu, Y-C., Wang, C-W., Lin, E-K.

MRS-Materials Research Society

Hsu, Wen L., Folts, G. W., Greulich, F. A., McCarry, K. F., Thomas, G. J., Green, P. F., Doyle, B. L

Materials Research Society

2 Conference Proceedings GaN Growth by Nitrogen ECR-CVD Method

Chen, K. H., Chao, C. H., Chuang, T. J., Yang, Y. J., Chen, L. C., Chen, C. K., Huang, Y. F., Yang, C. H., Lin, H. Y., …

MRS - Materials Research Society

T. H. Wu, P. C. Kuo, J.-P. Chen, C.-Y. Wu, P.-F. Yen, T.-R. Jeng, D.-R. Huang, S.-L. Ou

SPIE - The International Society of Optical Engineering

Biasotto, C., Monte, B., Neli, R. R., Ramos, A. C. S., Diniz, J. A., Moshkalyov, S.A., Doi, I., Swart, J. W.

Electrochemical Society

Huang, R. F., Wen, L. S., Wang, H., Wu, J., Hong, R. J.

Materials Research Society

Chen, L. C., Wu, C. T., Wen, C-Y., Wu, J-J., Liu, W. T., Liu, C. W.

MRS-Materials Research Society

Simionescu, C., Wojcik, J., Haugen, H.K., Davies, J.A., Mascher, P.

Electrochemical Society

A.M. Wu, H.Y. Yue, X.Y. Zhang, F.W. Qin, T.J. Li

Trans Tech Publications

Barbour, J. C., Lovejoy, M. L., Ashby, C. I. H., Howard, A. J., Custer, J. S., Shul, R. J.

MRS - Materials Research Society

Chen, L. C., Chen, C. K., Bhusari, D. M., Chen, K. H., Wei, S. L., Chen, Y. F., Jong, Y. C., Lin, D. Y., Li, C. F., …

MRS - Materials Research Society

Chan, C.L., Chou, W.C., Ma, K.J., Chen, T.T., Liu, Y.M., Kuo, Y.S., Chen, Y.T.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12