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Direct Observation of Floating Body Effect in SOI MOS FET Using Nuclear Microprobe

Author(s):
Thkai, M ( (Osaka University) )
Nakayama, N ( (Osaka University) )
Takaoka, H ( (Osaka University) )
Iwamatsu, T ( (Mitsubishi Electric Co) )
Yamaguchi, Y ( (Mitsubishi Electric Co) )
Maegawa, S ( (Mitsubishi Electric Co) )
Nishimura, T ( (Mitsubishi Electric Co) )
Horino, A Kinomura andY ( (ONRI) )
3 more
Publication title:
Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-3
Pub. date:
1999
Page(from):
305
Page(to):
310
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772259 [1566772257]
Language:
English
Call no.:
E23400/99-3
Type:
Conference Proceedings

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