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A New Characterisation Process Used to Qualify SOI Films

Author(s):
Moriceau, H ( (LETI-CEA), )
Aspar, B ( (LETI-CEA), )
Bruel, M ( (LETI-CEA), )
Cartier, A M ( (LETI-CEA), )
Morales, C ( (LETI-CEA), )
Soubie, A ( (LETI-CEA), )
Barge, T ( (SOIThC) )
Bressot, S ( (SOIThC) )
Maleville, C ( (SOIThC) )
Auberton, A I ( (SOIThC) )
5 more
Publication title:
Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-3
Pub. date:
1999
Page(from):
173
Page(to):
178
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772259 [1566772257]
Language:
English
Call no.:
E23400/99-3
Type:
Conference Proceedings

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