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Ion-Cut Silicon Layer Transfer with Patterned Implantation of Hydrogen

Author(s):
Yun, C H ( (University of California, Berkeley) )
Wengrow, A B ( (University of California, Berkeley) )
Cheung, NW ( (University of California, Berkeley) )
Zheng, Y ( (University of California, San Diego) )
Welty, R J ( (University of California, San Diego) )
Guan, Z F ( (University of California, San Diego) )
Smith, K V ( (University of California, San Diego) )
Asbeck, PM ( (University of California, San Diego) )
Yu, E T ( (University of California, San Diego) )
Lau, S S ( (University of California, San Diego) )
5 more
Publication title:
Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-3
Pub. Year:
1999
Page(from):
125
Page(to):
130
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772259 [1566772257]
Language:
English
Call no.:
E23400/99-3
Type:
Conference Proceedings

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