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ELTRAN by Splitting Porous Si Layers

Author(s):
Sakaguchi, K ( (Canon, Inc) )
Yanagita, Y ( (Canon, Inc) )
Kurisu, H ( (Canon, Inc) )
Suzuki, H ( (Canon, Inc) )
Obmi, K ( (Canon, Inc) )
Yonehara, T ( (Canon, Inc) )
1 more
Publication title:
Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-3
Pub. Year:
1999
Page(from):
117
Page(to):
121
Pages:
5
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772259 [1566772257]
Language:
English
Call no.:
E23400/99-3
Type:
Conference Proceedings

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