Blank Cover Image

Recent Progress in Low-Dose SIMOX Wafers Fabricated with Lateral-Thermal Oxidation (ITOX) Process (Invited)

Author(s):
Matsumura, A ( (Nippon Steel Corporation) )
Kawamura, K ( (Nippon Steel Corporation) )
Mizutani, T ( (Nippon Steel Corporation) )
Takaysma, S ( (Nippon Steel Corporation) )
Hamaguchi, I ( (Nippon Steel Corporation) )
Nagatake, Y ( (Nippon Steel Corporation) )
1 more
Publication title:
Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-3
Pub. date:
1999
Page(from):
79
Page(to):
92
Pages:
14
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772259 [1566772257]
Language:
English
Call no.:
E23400/99-3
Type:
Conference Proceedings

Similar Items:

Tachimori, M, Masui, S, Nakajima, T, Kawamura, K, Hamaguchi, I, Yano, T, Nagatake, Y

Electrochemical Society

Blake, J., Gelpey, J. C., Lee, D. M., Rowland, L., Rozgonyi, G. A.

Materials Research Society

Kawaniura, K., Hamaguchi, I., Sasaki, T., Takayania, S., Nagatake, Y., Matsumura, A.

Electrochemical Society

Aspar, B., Pudda, C., Papon, A.M., Auberton-Herve, A.J., Lamure, J.M.

Electrochemical Society

Hamada, K., Hamajima, T., Kitano, T., Ohnishi, H., Yoshino, A.

Electrochemical Society

Anc, M J, Cordss, B F, Blake, J G, Nakai, T

Electrochemical Society

Jablonski, J, Miyanuwa, Y, Mchedlid:e, T R, Saito, M, Katayama, T, Imai, M, Nakashima, S

Electrochemical Society

Aita,K., Yasaka,A., Kitamura,T., Matsumura,H., Satoh,Y., Nakamura,H., Fujikawa,J., Tsuchiya,K., Noguchi,S.

SPIE-The International Society for Optical Engineering

Dimitrakis, P., Papaioannou, G., Cristoloveanu, S.

Electrochemical Society

Sasaki, N., Iwai, T., Kawamura, S., Mukai, R., Waka, K., Nakano, M.

North Holland

12 Conference Proceedings NITROGEN CONTAMINATION IN SIMOX WAFER

Davis, G. E., Jones, K. S., Prussin, S.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12