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3-D Silicon-on-Insulator (SQl) Technologies Using Epitaxial Lateral Overgrowth (ELO) (Invited)

Author(s):
Neudeck, G.W. ( (Purdue University) )  
Publication title:
Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-3
Pub. Year:
1999
Page(from):
25
Page(to):
35
Pages:
11
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772259 [1566772257]
Language:
English
Call no.:
E23400/99-3
Type:
Conference Proceedings

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