Blank Cover Image

MONIE CARLO SIMULATIONS OF DIFECTS EVOLUTION AND CLUSTERING IN ION-INIPLANTED SI

Author(s):
Publication title:
Proceedings of the Fifth International Symposium of Process Physics and Modeling in Semiconductor Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-2
Pub. date:
1999
Page(from):
46
Page(to):
57
Pages:
12
Pub. info.:
Pennington, New Jersey: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772242 [1566772249]
Language:
English
Call no.:
E23400/99-2
Type:
Conference Proceedings

Similar Items:

Magna, A. La, Coffa, S., Colombo, L.

MRS - Materials Research Society

Colombo, L., Servalli, G.

Materials Research Society

Itoh S., Ihara S.

Kluwer Academic Publishers

Cotta, M. A., Hamm, R. A., Chu, S. N. G., Staley, T. W., Harriott, L. R., Panish, M. B., Temkin, H.

MRS - Materials Research Society

M. Camarda, A. La Magna, F. La Via

Trans Tech Publications

Maric, D., Colombo, L.

MRS - Materials Research Society

Colombo L.

Kluwer Academic Publishers

Maric, D., Colombo, L.

MRS - Materials Research Society

5 Conference Proceedings Silicon Self-Interstitial Clusters

Colombo, L., Bongiorno, A., Rosati, M.

MRS - Materials Research Society

Benedek, G., Colombo, L., Spadoni, S., Gaito, S., Milani, P.

MRS - Materials Research Society

M. Camarda, A. La Magna, P. Fiorenza, G. Izzo, F. La Via

Trans Tech Publications

Monie, S. A., Pantano, C. G.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12