PHYSICALLY BASED MODELS FOR INIDIUM AND GERMANIUM ION INIPLANIS INTO SILICON
- Author(s):
Taseb, A.F. Kainciiitsa, D. McCoy, W. Baumaun, S. Blcier, R. Sicloif, D. Dyer, D. Zeitzoff, P. - Publication title:
- Proceedings of the Fifth International Symposium of Process Physics and Modeling in Semiconductor Technology
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 99-2
- Pub. Year:
- 1999
- Page(from):
- 33
- Page(to):
- 45
- Pages:
- 13
- Pub. info.:
- Pennington, New Jersey: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772242 [1566772249]
- Language:
- English
- Call no.:
- E23400/99-2
- Type:
- Conference Proceedings
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