Control of Grown-in Defects in Czochralski Silicon Crystals
- Author(s):
- Publication title:
- Proceedings of the Third International Symposium on Defects in Silicon
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 99-1
- Pub. Year:
- 1999
- Page(from):
- 372
- Page(to):
- 385
- Pages:
- 14
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772235 [1566772230]
- Language:
- English
- Call no.:
- E23400/99-1
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
INVITED: NATURE AND GENERATION OF GROWN-IN DEFECTS IN CZOCHRALSKI SILICON CRYSTALS
Electrochemical Society |
Electrochemical Society |
2
Conference Proceedings
Control of grown-in defects in nitrogen-doped CZ silicon crystal for new generation devices
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
4
Conference Proceedings
Growth Parameters Determining the Type of Grown-in Defects in Czochralski Silicon Crystals
Trans Tech Publications |
Electrochemical Society |
5
Conference Proceedings
Investigation of the Effect of Thermal History on Ring-OSF Formation in CZ-Silicon Crystals
MRS - Materials Research Society |
11
Conference Proceedings
Effects of Growth Parameters on the Defects Formation in the Czochralski Grown Silicon Crystal
Electrochemical Society |
Materials Research Society |
12
Conference Proceedings
A STUDY OF DEFECTS IN CZOCHRALSKI-GROWN SILICON BY POSITION ANNIHILATION SPECTROSCOPY
Materials Research Society |