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The Role of Metal Contamination and Crystal Defects in Quarter Micron Technology

Author(s):
Obry, M.
Bergholz, W.
Cerva, H.
Kurner, W.
Schrems, M.
Sachse, J.-U.
Winkler, R.
2 more
Publication title:
Proceedings of the Third International Symposium on Defects in Silicon
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-1
Pub. Year:
1999
Page(from):
133
Page(to):
149
Pages:
17
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772235 [1566772230]
Language:
English
Call no.:
E23400/99-1
Type:
Conference Proceedings

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