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Characterization of Process-Induced Defects in Silicon Technology

Author(s):
Cerva, H.
Hammerl, E.
Lemme, R.
Schwalke, U.
Wangemann, K.
Zoth, G.
1 more
Publication title:
Proceedings of the Third International Symposium on Defects in Silicon
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-1
Pub. Year:
1999
Page(from):
55
Page(to):
67
Pages:
13
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772235 [1566772230]
Language:
English
Call no.:
E23400/99-1
Type:
Conference Proceedings

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