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Experimental Gas-Phase Kinetics for Parallel-Plate PECVD

Author(s):
Publication title:
Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-23
Pub. Year:
1998
Page(from):
167
Page(to):
178
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772174 [1566772176]
Language:
English
Call no.:
E23400/98-23
Type:
Conference Proceedings

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