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Chemical Kinetics for Modeling Silicon Epitaxy from Chlorosilanes

Author(s):
Ho, P.
Balakrishna, A.
Chacin, J.M.
Thilderkvist., A.
Haas, B.
Comita, P.B.
1 more
Publication title:
Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-23
Pub. Year:
1998
Page(from):
117
Page(to):
122
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772174 [1566772176]
Language:
English
Call no.:
E23400/98-23
Type:
Conference Proceedings

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