Blank Cover Image

The Effect of Oxygen Incorporation in ELA Poly-SI Films and Its Relation to Poly-Si TFT Device Performance

Author(s):
Publication title:
Proceedings of the fourth Symposium on Thin Film Transistor Technologies
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-22
Pub. Year:
1998
Page(from):
43
Page(to):
50
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772167 [1566772168]
Language:
English
Call no.:
E23400/98-22
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Co-Optimization of Si Thin-Film Deposition and Excimer Laser Anneal Processes for Fabrication of High-Performance p-Si TFTs

Voutsas, A. T., Marmorstein, A., Solanki, R.

MRS - Materials Research Society
7 Conference Proceedings Modeling laser beam spatial separation effects for projection laser crystallization

Kisdarjono, H., Voutsas, A.T., Solanki, R.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Characteristics of excimer-laser-annealed polysilicon films for application in polysilicon thin film transistor devices

Voutsas,T., Marmorstein,A., Solanki,R.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Location-controlled crystallization of Si films for TFT circuitapplications

Crowder, M.A., Voutsas, A.T., Droes, S.R.T., Moriguchi, M., Mitani, Y.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Simulation of transient temperature profiles during ELA and relation to process parameters

Kisdarjono,H., Voutsas,T., Solanki,R., Kumar,A.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings TFT threshold voltage adjustment with in-situ doped PVD silicon films

Droes, S.R.T., Atkinson, M.M., Guthrie, P.R., Crowder, M.A., Voutsas, A.T.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Device and Process Technology Requirements for Next-Generation, Ultra-High- Performance Poly-Si TFTs

Voutsas, A.T.

Electrochemical Society
10 Conference Proceedings High-Performance Polycrystalline Silicon TFTs Fabricated Using the SPC and ELA Merhods*

Hamada, H., Aya, Y., Abe, H., Nouda, T., Hirano, K., Miyai, Y.

Electrochemical Society
5 Conference Proceedings Poly-Si TFT Technology: Advances in Material, Process and Device Technology

A.T. Voutsas

Electrochemical Society
11 Conference Proceedings Poly-silicon TFT AM-OLED on thin flexible metal substrates

Afentakis, T., Hatalis, M.K., Voutsas, A.T., Hartzell, J.W.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings The Role of Grain Boundaries on the Performance of Poly-Si TFTs

L.K. Michalas, G.J. Papaioannou, D.N. Kouvatsos, A.T. Voutsas

Electrochemical Society
12 Conference Proceedings A DLTS Study of Band Gap States in SLS Poly-Si TFTs

L. Michalas, G. Papaioannou, A. Voutsas

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12