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Development of a Modified Silicon Wafer Clean to Improve Lifetime

Author(s):
Hackenberg, D.L.
Butler, B.J.
Cameron, R.C.
Linn, J.H.
Lobmeyer, R.N.
McNamara, J.M.
Pasqua, R.V.
Rafie, S.
Rouse, G.V.
Slasor, S.T.
Valade, T.A.
Wereb, W.J.
Yates, P.D.
8 more
Publication title:
Proceedings of the Fifth International Symposium on High Purity Silicon V
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-13
Pub. Year:
1998
Page(from):
241
Page(to):
249
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772075 [1566772079]
Language:
English
Call no.:
E23400/98-13
Type:
Conference Proceedings

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